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B-pab-plasmareactorlpplasmaactivation.png (689 × 404 pixels, file size: 13 KB, MIME type: image/png)

Description
English: Scheme of a plasma reactor for low pressure plasma activated bonding
Source D. Wünsch and B. Müller and M. Wiemer and T. Gessner and H. Mischke, Aktivierung mittels Niederdruckplasma zur Herstellung von Si-Verbunden im Niedertemperatur-Bereich und deren Charakterisierung mittels Mikro-Chevron-Test (2010)
Author Fraunhofer ENAS, D. Neumann
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Date/TimeThumbnailDimensionsUserComment
current08:57, 11 April 2011Thumbnail for version as of 08:57, 11 April 2011689 × 404 (13 KB)EnaswikiImproved plasma area
11:43, 10 April 2011Thumbnail for version as of 11:43, 10 April 2011689 × 404 (13 KB)Enaswiki{{Information |Description ={{en|1=Scheme of a plasma reactor for low pressure plasma activated bonding}} |Source ={{own}} |Author =Enaswiki |Date = |Permission ={{cc-by-sa-3.0-de|Fraunhofer ENAS}} |other

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